دورية أكاديمية
Electrical uniformity analyses on 12-inch Si-based Hf0.5Zr0.5O2 ferroelectric capacitor devices by atomic layer deposition
| العنوان: | Electrical uniformity analyses on 12-inch Si-based Hf0.5Zr0.5O2 ferroelectric capacitor devices by atomic layer deposition |
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| المؤلفون: | Ding, Wen-Juan, Liu, Yu, Xiao, Zhi-Qiang, Gao, Li, Li, Yu-Chen, Zhu, Lin, Li, Xiang, Li, Wei-Min, Chen, Shuang, Li, Ai-Dong |
| المصدر: | In Progress in Natural Science: Materials International June 2024 34(3):598-605 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 10020071 |
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| DOI: | 10.1016/j.pnsc.2024.05.008 |