دورية أكاديمية
Metal-organic decomposed cerium oxide thin film in mixed ambient at different temperatures for MOS capacitor
العنوان: | Metal-organic decomposed cerium oxide thin film in mixed ambient at different temperatures for MOS capacitor |
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المؤلفون: | Ahmad, Farah Hayati, Hassan, Zainuriah, Lim, Way Foong |
المصدر: | In Sustainable Materials and Technologies April 2023 35 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 22149937 |
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DOI: | 10.1016/j.susmat.2022.e00556 |