دورية أكاديمية
Self-isolating electrode deposition process using the area-selective MoO2 and MoO3 atomic layer deposition technique
العنوان: | Self-isolating electrode deposition process using the area-selective MoO2 and MoO3 atomic layer deposition technique |
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المؤلفون: | Kim, Ye Won, Park, Jejune, Park, Jeong Hyeon, Han, Eul, Jung, Younjae, Jang, Yong Woon, Lee, Min Yung, Jeon, Woojin |
المصدر: | In Applied Materials Today April 2024 37 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 23529407 |
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DOI: | 10.1016/j.apmt.2024.102160 |