دورية أكاديمية
Study of the Composition of Impurities in High-Purity Monosilane Obtained from Magnesium Silicide Using the Method of Chromatography–Mass Spectrometry
العنوان: | Study of the Composition of Impurities in High-Purity Monosilane Obtained from Magnesium Silicide Using the Method of Chromatography–Mass Spectrometry |
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المؤلفون: | Sozin, A. Yu.Aff1, Kotkov, A. P.Aff2, Grishnova, N. D., Anoshin, O. S., Skosyrev, A. I., Arhiptsev, D. F., Chernova, O. Yu., Sorochkina, T. G. |
المصدر: | Inorganic Materials. 55(14):1371-1376 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 00201685 16083172 |
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DOI: | 10.1134/s0020168519140139 |