دورية أكاديمية
Some properties of chemically vapor deposited films of AlxOyNz on silicon
| العنوان: | Some properties of chemically vapor deposited films of Al |
|---|---|
| المؤلفون: | Irene, E. A., Silvestri, V. J., Woolhouse, G. R. |
| المصدر: | Journal of Electronic Materials. June 1975 4(3):409-427 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 03615235 1543186X |
|---|---|
| DOI: | 10.1007/bf02666227 |