دورية أكاديمية
The Influence of the Thickness of Silicon- and Oxygen-Doped Hydrogenized Carbon Films on Their Surface Properties
العنوان: | The Influence of the Thickness of Silicon- and Oxygen-Doped Hydrogenized Carbon Films on Their Surface Properties |
---|---|
المؤلفون: | Grenadyorov, A. S.Aff1, IDS1063784221010096_cor1, Solov’ev, A. A., Oskomov, K. V. |
المصدر: | Technical Physics. 66(1):139-144 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 10637842 10906525 |
---|---|
DOI: | 10.1134/s1063784221010096 |