دورية أكاديمية
Radiation-Induced Alteration of the Reflection Spectra of Diazoquinone–Novolac Photoresist Films by Implantation of Ag+ Ions
العنوان: | Radiation-Induced Alteration of the Reflection Spectra of Diazoquinone–Novolac Photoresist Films by Implantation of Ag+ Ions |
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المؤلفون: | Kharchenko, A. A., Brinkevich, D. I.Aff2, IDS0018143923060061_cor2, Brinkevich, S. D.Aff2, Aff3, Prosolovich, V. S. |
المصدر: | High Energy Chemistry. 57(6):498-503 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 00181439 16083148 |
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DOI: | 10.1134/s0018143923060061 |