دورية أكاديمية
Charge Transport Mechanism in a PECVD Deposited Low-k SiOCH Dielectric
| العنوان: | Charge Transport Mechanism in a PECVD Deposited Low-k SiOCH Dielectric |
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| المؤلفون: | Perevalov, T. V.Aff1, IDs11664021094118_cor1, Gismatulin, A. A., Gritsenko, V. A.Aff1, Aff2, Xu, H.Aff3, Aff4, Zhang, J., Vorotilov, K. A., Baklanov, M. R.Aff4, Aff5 |
| المصدر: | Journal of Electronic Materials. 51(5):2521-2527 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 03615235 1543186X |
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| DOI: | 10.1007/s11664-021-09411-8 |