دورية أكاديمية
Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating
| العنوان: | Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating |
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| المؤلفون: | Grenadyorov, A. S.Aff1, Aff2, IDs1118202302837z_cor1, Zakharov, A. N., Oskirko, V. O.Aff1, Aff2, Sidelev, D. V., Oskomov, K. V., Solovyev, A. A. |
| المصدر: | Russian Physics Journal. 65(11):1825-1831 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 10648887 15739228 |
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| DOI: | 10.1007/s11182-023-02837-z |