دورية أكاديمية
Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices
| العنوان: | Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices |
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| المؤلفون: | Tharpe, Troy, Hershkovitz, Eitan, Hakim, Faysal, Kim, Honggyu, Tabrizian, RoozbehAff1, IDs41928023009999_cor5 |
| المصدر: | Nature Electronics. 6(8):599-609 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. | تدمد: | 25201131 |
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| DOI: | 10.1038/s41928-023-00999-9 |