دورية أكاديمية
Effect of HCl on the doping and shape control of silicon nanowires.
| العنوان: | Effect of HCl on the doping and shape control of silicon nanowires. |
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| المؤلفون: | Gentile P; SiNaPS Laboratory SP2M, UMR-E CEA/UJF-Grenoble 1, INAC, Grenoble, F-38054, France. pascal.gentile@cea.fr, Solanki A, Pauc N, Oehler F, Salem B, Rosaz G, Baron T, Den Hertog M, Calvo V |
| المصدر: | Nanotechnology [Nanotechnology] 2012 Jun 01; Vol. 23 (21), pp. 215702. Date of Electronic Publication: 2012 May 03. |
| نوع المنشور: | Journal Article; Research Support, Non-U.S. Gov't |
| اللغة: | English |
| بيانات الدورية: | Publisher: IOP Pub Country of Publication: England NLM ID: 101241272 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1361-6528 (Electronic) Linking ISSN: 09574484 NLM ISO Abbreviation: Nanotechnology Subsets: MEDLINE |
| أسماء مطبوعة: | Original Publication: Bristol, UK : IOP Pub., c1990- |
| مواضيع طبية MeSH: | Crystallization/*methods , Hydrochloric Acid/*chemistry , Nanostructures/*chemistry , Nanostructures/*ultrastructure , Silicon/*chemistry, Macromolecular Substances/chemistry ; Materials Testing ; Molecular Conformation ; Particle Size ; Surface Properties |
| مستخلص: | The introduction of hydrogen chloride during the in situ doping of silicon nanowires (SiNWs) grown using the vapor-liquid-solid (VLS) mechanism was investigated. Compared with non-chlorinated atmospheres, the use of HCl with dopant gases considerably improves the surface morphology of the SiNWs, leading to extremely smooth surfaces and a greatly reduced tapering. Variations in the wire diameter are massively reduced for boron doping, and cannot be measured at 600 °C for phosphorous over several tens of micrometers. This remarkable feature is accompanied by a frozen gold migration from the catalyst, with no noticeable levels of gold clusters observed using scanning electron microscopy. A detailed study of the apparent resistivity of the NWs reveals that the dopant incorporation is effective for both types of doping. A graph linking the apparent resistivity to the dopant to silane dilution ratio is built for both types of doping and discussed in the frame of the previous results. |
| المشرفين على المادة: | 0 (Macromolecular Substances) QTT17582CB (Hydrochloric Acid) Z4152N8IUI (Silicon) |
| تواريخ الأحداث: | Date Created: 20120504 Date Completed: 20120830 Latest Revision: 20131121 |
| رمز التحديث: | 20221213 |
| DOI: | 10.1088/0957-4484/23/21/215702 |
| PMID: | 22551776 |
| قاعدة البيانات: | MEDLINE |
Full Text Finder | تدمد: | 1361-6528 |
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| DOI: | 10.1088/0957-4484/23/21/215702 |