دورية أكاديمية
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Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage.

التفاصيل البيبلوغرافية
العنوان: Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage.
المؤلفون: Chen Z; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.; State Key Laboratory of Transducer Technology, Shanghai 200050, China., Jia Q; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.; State Key Laboratory of Transducer Technology, Shanghai 200050, China., Liu W; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.; State Key Laboratory of Transducer Technology, Shanghai 200050, China., Yuan Q; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China., Zhu Y; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.; State Key Laboratory of Transducer Technology, Shanghai 200050, China., Yang J; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.; State Key Laboratory of Transducer Technology, Shanghai 200050, China., Yang F; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
المصدر: Sensors (Basel, Switzerland) [Sensors (Basel)] 2020 Dec 08; Vol. 20 (24). Date of Electronic Publication: 2020 Dec 08.
نوع المنشور: Journal Article
اللغة: English
بيانات الدورية: Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: PubMed not MEDLINE; MEDLINE
أسماء مطبوعة: Original Publication: Basel, Switzerland : MDPI, c2000-
مستخلص: This work investigates the dominant energy dissipations of the multi-frequency whispering gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the devices. An extensive theory for each loss source was established and experimentally testified. The squeezed film damping (SFD) is a major loss for all the WGMs at atmosphere, which is distinguished from traditional bulk acoustic wave (BAW) resonators where the high-order modes suffer less from the air damping. In vacuum, the SFD is negligible, and the frequency-dependent Akhiezer damping (AKE) has significant effects on different order modes. For low-order WGMs, the AKE is limited, and the anchor loss behaves as the dominant loss. For high-order modes with an extended nodal region, the anchor loss is reduced, and the AKE determines the Q values. Substantial Q enhancements over four times and an excellent f × Q product up to 6.36 × 10 13 at 7 K were achieved.
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معلومات مُعتمدة: 61734007 National Natural Science Foundation of China; 61404136 National Natural Science Foundation of China; 61704166 National Natural Science Foundation of China; QYZDY-SSW-JSC004 Key research program of Frontier Science of CAS; 29E07RQC03 Youth Innovation Promotion Association of CAS
فهرسة مساهمة: Keywords: MEMS resonator; loss mechanism; multi-frequency; quality factor; whispering gallery mode
تواريخ الأحداث: Date Created: 20201211 Latest Revision: 20240330
رمز التحديث: 20240330
مُعرف محوري في PubMed: PMC7764441
DOI: 10.3390/s20247017
PMID: 33302455
قاعدة البيانات: MEDLINE
الوصف
تدمد:1424-8220
DOI:10.3390/s20247017