التفاصيل البيبلوغرافية
| العنوان: |
Real-time process monitoring for changing inputs. |
| المؤلفون: |
Grimshaw, Scott D., Shellman, Scott D., Hurwitz, Arnon M. |
| المصدر: |
Technometrics; Nov98, Vol. 40 Issue 4, p283, 14p, 5 Charts, 6 Graphs |
| مصطلحات موضوعية: |
STATISTICAL process control, REAL-time computing |
| مستخلص: |
Presents a method for statistical process control using real-time data in applications with finite processing times. Summary scored modeled by recipe; End-of-run process monitoring; End-of-run process diagnostics; Within-run process monitoring; Case studies that use the real-time process monitor; Reactive ion etching (RIE) process; Chemical-mechanical planarization (CMP) process. |
| قاعدة البيانات: |
Complementary Index |
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