Multi-type surface and thin film characterization using light scattering, scanning force microscopy and white light interferometry.

التفاصيل البيبلوغرافية
العنوان: Multi-type surface and thin film characterization using light scattering, scanning force microscopy and white light interferometry.
المؤلفون: Duparré, Angela, Notni, Gunther
المصدر: Proceedings of SPIE; 3/11/2017, Vol. 10294, p213-231, 19p
قاعدة البيانات: Complementary Index
الوصف
تدمد:0277786X
DOI:10.1117/12.351662