مؤتمر
Novel method to achieve CD modeling in the presence of higher diffraction orders.
| العنوان: | Novel method to achieve CD modeling in the presence of higher diffraction orders. |
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| المؤلفون: | Atkins, Phillip R., Liequan Lee, Krishnan, Shankar, Chi-Fu Yen, Shyh-Shii Pai, Weihan Chang, Nick, Hsien-Hung Chang, Li-Shiuan Tsai, Sheng-Yang Tseng, Jan-Hau Chang, Yung-Hsiang Lin, Chu-Han Chiu, Chun-Sheng Wu |
| المصدر: | Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-6, 6p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2522826 |