Mechanical design of a flexural nanopositioning stage system for hard x-ray nanofocusing at the Advanced Photon Source 32-ID-C station.

التفاصيل البيبلوغرافية
العنوان: Mechanical design of a flexural nanopositioning stage system for hard x-ray nanofocusing at the Advanced Photon Source 32-ID-C station.
المؤلفون: Deming Shu, De Andrade, Vincent, Anton, Jayson, Kearney, Steven, Fezzaa, Kamel, Bean, Sunil, Deriy, Alex, Wenjun Liu, Maser, Jorg, Lai, Barry, Tischler, Jonathan Z., De Carlo, Francesco
المصدر: Proceedings of SPIE; 6/24/2019, Vol. 1112, p1-9, 9p
قاعدة البيانات: Complementary Index
الوصف
تدمد:0277786X
DOI:10.1117/12.2529384