التفاصيل البيبلوغرافية
| العنوان: |
Photosensor Array for Optical Encoder. |
| المؤلفون: |
Matoba, Takashi, Kawai, Mayumi, Ono, Yutaka |
| المصدر: |
Electronics & Communications in Japan, Part 2: Electronics; Jan1992, Vol. 75 Issue 1, p56-63, 8p |
| مصطلحات موضوعية: |
DETECTORS, ENGINEERING instruments, ION implantation, ION bombardment, CRYSTALLOGRAPHY, OPTICAL resolution |
| مستخلص: |
A photosensor array has been fabricated for the optical rotary encoder detector in a direct drive motor (DDM). The fabricated sensor chip has a dimension of 6.2 × 1.1 mm², two sets of 48-device photosensor are rays, and two photosensors for origin detection. The photosensor device is a pn junction silicon photodiode and has features of impurity diffusion by ion implantation, utilization of two interconnects using poly-silicon and Al and an anti-reflection film with two-layer structure. The fabricated photosensor array has a high output sensitivity of 0.6 A/W (&lamda; = 850 nm), low-sensitivity variation of ± 1 percent and low dark current of 1 pA (Vr = 1 V). Using this photosensor array, the encoder has a resolution of 2 M pulses/rev and position accuracy of ±2 s, enabling a position detection with high resolution and high accuracy. This paper presents an overview and describes the fabrication process and characteristics. [ABSTRACT FROM AUTHOR] |
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| قاعدة البيانات: |
Complementary Index |
