مؤتمر
Dielectric material etch selectivity control in dual-frequency capacitively coupled plasmas with dc-superposition.
| العنوان: | Dielectric material etch selectivity control in dual-frequency capacitively coupled plasmas with dc-superposition. |
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| المؤلفون: | Zhang, Du, Kim, Hojin, McInerney, Kathleen, Luan, Pingshan, Rogalskyj, George, Wang, Mingmei |
| المصدر: | Proceedings of SPIE; 1/23/2022, Vol. 12056, p1205606-1205606, 1p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2614434 |