دورية أكاديمية
An Evaluation of Beam-Damage Zone in Si Wafer Machined by Gatan MicroPREPTM Laser-Ablation.
| العنوان: | An Evaluation of Beam-Damage Zone in Si Wafer Machined by Gatan MicroPREPTM Laser-Ablation. |
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| المؤلفون: | Zhao, Wayne, Bennett, Corbin, Pichumani, Pradip Sairam, Walker, Gerald, Eaton, Kevin, Shearer, Michael Hassel, Dumas, Laurent, Brooks, Irene, Wang, Ying |
| المصدر: | Microscopy & Microanalysis; Aug2019 Supplement, p1146-1147, 2p |
| قاعدة البيانات: | Complementary Index |
Full Text Finder | تدمد: | 14319276 |
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| DOI: | 10.1017/S1431927618006219 |