مؤتمر
Advanced development for contact-holes of metal-oxide resists.
| العنوان: | Advanced development for contact-holes of metal-oxide resists. |
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| المؤلفون: | Dinh, Cong Que, Nagahara, Seiji, Kato, Kanzo, Kawakami, Shinichiro, Kuwahara, Yuhei, Okada, Soichiro, Cho, Kayoko, Tomori, Hikari, Nakamura, Junji, Terada, Shoichi, Muramatsu, Makoto, Krawicz, Alexandra, McInerney, Kathleen, Antonovich, Nathan, Huli, Lior |
| المصدر: | Proceedings of SPIE; 12/19/2023, Vol. 12750, p1275009-1275009, 1p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2687434 |