التفاصيل البيبلوغرافية
| العنوان: |
Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering. |
| المؤلفون: |
Taylor, G. V., Bayu Aji, L. B., Shin, S. J., Bae, J. H., Engwall, A. M., Kucheyev, S. O. |
| المصدر: |
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2024, Vol. 42 Issue 4, p1-6, 6p |
| مصطلحات موضوعية: |
BORON carbides, BORIDING, EROSION, SUBSTRATES (Materials science), MAGNETRONS, RADIO frequency, RESIDUAL stresses, MAGNETRON sputtering |
| مستخلص: |
Boron carbide coatings deposited by sputtering with conventional planar magnetrons exhibit nodular growth defects. Here, we demonstrate that the density of nodular defects in B 4 C films can be greatly reduced by using a full-face-erosion magnetron source that achieves a more uniform target erosion by sweeping the confining magnetic field over the target surface. We systematically study properties of B 4 C films deposited on substrates with different tilt angles and demonstrate deposition of ultrathick films with compressive residual stress below 200 MPa. [ABSTRACT FROM AUTHOR] |
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| قاعدة البيانات: |
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