التفاصيل البيبلوغرافية
| العنوان: |
Effects of impedance matching network on α - γ mode transition in atmospheric pressure RF discharges. |
| المؤلفون: |
Du, M. Q., Ding, Z. F., Qi, L. W., Wen, X. D., Sun, B. |
| المصدر: |
Japanese Journal of Applied Physics; Aug2024, Vol. 63 Issue 8, p1-6, 6p |
| مستخلص: |
In atmospheric pressure RF discharges, positive and negative feedback regions are defined based on the influence of varying the capacitance of the series capacitor in an inverted L-type impedance matching network on the fed RF power at the input port of the impedance matching network. The impact of the impedance matching network on the α - γ mode transition was investigated by adjusting the tuning series capacitor in the impedance matching network. The critical RF power, as well as the current and voltage at the α - γ mode transition, is almost independent of the impedance matching network, while the counterpart immediately after the α - γ mode transition varies remarkably. The underlying mechanism is understood in terms of different feedbacks. Positive and negative feedbacks respectively promote and suppress the increment in RF power during the α - γ mode transition. [ABSTRACT FROM AUTHOR] |
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