التفاصيل البيبلوغرافية
| العنوان: |
Effect of excimer laser annealing on the structural and electrical properties of polycrystalline... |
| المؤلفون: |
Angelis, C.T., Miyasaka, M. |
| المصدر: |
Journal of Applied Physics; 10/15/1999, Vol. 86 Issue 8, p4600, 7p, 2 Black and White Photographs, 1 Chart, 6 Graphs |
| مصطلحات موضوعية: |
THIN film transistors, EXCIMER lasers, ELECTRONICS |
| مستخلص: |
Features a study on the effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors in relation to the laser energy density. Use of different laser energy densities to improve the film quality; Experimental procedure; Results and discussion; Conclusions. |
| قاعدة البيانات: |
Complementary Index |
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