دورية أكاديمية

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows.

التفاصيل البيبلوغرافية
العنوان: Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows.
المؤلفون: Clarence Chang, John Carlstrom, Aaron Datesman, Stephan Meyer, Valentyn Novosad, Volodymyr Yefremenko, Tom Crawford, Tom Downes, Jeff McMahon, Kathryn Miknaitis, Joaquin Vieira
المصدر: Journal of Low Temperature Physics; Apr2008, Vol. 151 Issue 1/2, p245-248, 4p
مصطلحات موضوعية: SURFACES (Technology), FRICTION, SURFACES (Physics), TRIBOLOGY
مستخلص: Abstract   The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window. [ABSTRACT FROM AUTHOR]
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قاعدة البيانات: Complementary Index
الوصف
تدمد:00222291
DOI:10.1007/s10909-007-9639-8