التفاصيل البيبلوغرافية
العنوان: |
A filamentless ion source for materials processing. |
المؤلفون: |
Anders, Andre, Vizir, Alexey, MacGill, Robert A., Brown, Ian G. |
المصدر: |
Review of Scientific Instruments; Feb1998, Vol. 69 Issue 2, p880, 3p, 2 Diagrams, 5 Graphs |
مصطلحات موضوعية: |
ION sources, PLASMA injection, ELECTRIC discharges |
مستخلص: |
Describes a multi-aperture gridded ion source for materials processing. Injection of a plasma stream into a discharge cavity in the constricted glow discharge; Simplification of the electrical setup; Operation of the source with grounded power supplies. |
قاعدة البيانات: |
Complementary Index |