التفاصيل البيبلوغرافية
| العنوان: |
A filamentless ion source for materials processing. |
| المؤلفون: |
Anders, Andre, Vizir, Alexey, MacGill, Robert A., Brown, Ian G. |
| المصدر: |
Review of Scientific Instruments; Feb1998, Vol. 69 Issue 2, p880, 3p, 2 Diagrams, 5 Graphs |
| مصطلحات موضوعية: |
ION sources, PLASMA injection, ELECTRIC discharges |
| مستخلص: |
Describes a multi-aperture gridded ion source for materials processing. Injection of a plasma stream into a discharge cavity in the constricted glow discharge; Simplification of the electrical setup; Operation of the source with grounded power supplies. |
| قاعدة البيانات: |
Complementary Index |
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