التفاصيل البيبلوغرافية
| العنوان: |
Evaluation of GeO desorption behavior in the metal/GeO2/Ge structure and its improvement of the electrical characteristics. |
| المؤلفون: |
Oniki, Yusuke, Koumo, Hideo, Iwazaki, Yoshitaka, Ueno, Tomo |
| المصدر: |
Journal of Applied Physics; Jul2010, Vol. 107 Issue 12, p124113, 5p, 1 Chart, 8 Graphs |
| مصطلحات موضوعية: |
GERMANIUM, OXIDES, OXIDATION, DESORPTION, CAPACITORS |
| مستخلص: |
The relation between germanium monoxide (GeO) desorption and either improvement or deterioration in electrical characteristics of metal/GeO2/Ge capacitors fabricated by thermal oxidation has been investigated. In the metal/GeO2/Ge stack, two processes of GeO desorption at different sites and at different temperatures were observed by thermal desorption spectroscopy measurements. The electrical characteristics of as-oxidized metal/GeO2/Ge capacitors shows a large flat-band voltage shift and minority carrier generation due to the GeO desorption from the GeO2/Ge interface during oxidation of Ge substrates. On the other hand, the electrical properties were drastically improved by a postmetallization annealing at low temperature resulting in a metal catalyzed GeO desorption from the top interface. [ABSTRACT FROM AUTHOR] |
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| قاعدة البيانات: |
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