دورية أكاديمية
Lithography and radiation chemistry of epoxy containing negative electron resists.
| العنوان: | Lithography and radiation chemistry of epoxy containing negative electron resists. |
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| المؤلفون: | Thompson, L. F., Feit, E. D., Heidenreich, R. D. |
| المصدر: | Polymer Engineering & Science; Jul1974, Vol. 14 Issue 7, p529-533, 5p |
| قاعدة البيانات: | Complementary Index |
Full Text Finder | تدمد: | 00323888 |
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| DOI: | 10.1002/pen.760140713 |