مؤتمر
Optical study of the influence of oxygen on the synthesis of SiC-buried layer in Cz-Si and Fz-Si.
| العنوان: | Optical study of the influence of oxygen on the synthesis of SiC-buried layer in Cz-Si and Fz-Si. |
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| المؤلفون: | Yukhimchuk, V. A., Melnik, V. P., Romanjuk, B. N., Popov, V. G., Klyui, Nickolai I. |
| المصدر: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p375-378, 4p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.306247 |