مؤتمر
Optical study of the influence of oxygen on the synthesis of SiC-buried layer in Cz-Si and Fz-Si.
العنوان: | Optical study of the influence of oxygen on the synthesis of SiC-buried layer in Cz-Si and Fz-Si. |
---|---|
المؤلفون: | Yukhimchuk, V. A., Melnik, V. P., Romanjuk, B. N., Popov, V. G., Klyui, Nickolai I. |
المصدر: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p375-378, 4p |
قاعدة البيانات: | Complementary Index |
تدمد: | 0277786X |
---|---|
DOI: | 10.1117/12.306247 |