مؤتمر
The application of optical resolution enhancement technology and e-beam direct writing technology in microfabrication.
| العنوان: | The application of optical resolution enhancement technology and e-beam direct writing technology in microfabrication. |
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| المؤلفون: | Qiu, Yulin, Chen, Baoqin, Liu, Ming, Xu, Qiuxia, Xue, Lijun, Ren, Liming, Hu, Yong, Long, Shibing, Lu, Jing, Kang, Xiaohui, Li, Ling, Li, Jinru, Tang, Yueke |
| المصدر: | Proceedings of SPIE; Nov2005, Issue 1, p353-364, 12p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.576170 |