مؤتمر
First look at across-chip performance and process noise using non-contact performance-based metrology.
| العنوان: | First look at across-chip performance and process noise using non-contact performance-based metrology. |
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| المؤلفون: | Babazadeh, Majid, Borot, Bertrand, Doedel, Wim, Estabil, José, Galvier, Jean, Johnson, Gloria, Pakdaman, Nader, Steinbrueck, Gary, Vickers, James |
| المصدر: | Proceedings of SPIE; Nov2006, Issue 1, p615502-615502-8, 8p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.683362 |