مؤتمر
Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding.
| العنوان: | Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding. |
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| المؤلفون: | Bakke, Thor, Völker, Benjamin, Rudloff, Dirk, Friedrichs, Martin, Schenk, Harald, Lakner, Hubert |
| المصدر: | Proceedings of SPIE; Nov2006, Issue 1, p611402-611402-7, 7p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.646182 |