مؤتمر
CMOS integrable micromirrors with highly improved drift-stability.
| العنوان: | CMOS integrable micromirrors with highly improved drift-stability. |
|---|---|
| المؤلفون: | Schmidt, Jan U., Knobbe, Jens, Gehner, Andreas, Lakner, Hubert |
| المصدر: | Proceedings of SPIE; Nov2007, Issue 1, p64670R-64670R-11, 11p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
|---|---|
| DOI: | 10.1117/12.707630 |