التفاصيل البيبلوغرافية
| العنوان: |
New ESCAP-type resist with enhanced etch resistance and its application to future DRAM and logic devices. |
| المؤلفون: |
Conley, Will, Brunsvold, William R., Buehrer, Fred, DellaGuardia, Ronald, Dobuzinsky, David, Farrell, Timothy R., Ho, Hok, Katnani, Ahmad D., Keller, Robin, Marsh, James T., Muller, Paul, Nunes, Ronald, Ng, Hung Y., Oberschmidt, James M., Pike, Michael, Ryan, Deborah, Cotler-Wagner, Tina, Schulz, Ron, Ito, Hiroshi, Hofer, Donald C. |
| المصدر: |
Proceedings of SPIE; Nov1997, Issue 1, p282-299, 18p |
| قاعدة البيانات: |
Complementary Index |
