مؤتمر
Method to improve setup and overlay performance on an excimer laser stepper using a unique DUV resist: KRS.
العنوان: | Method to improve setup and overlay performance on an excimer laser stepper using a unique DUV resist: KRS. |
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المؤلفون: | Petrillo, Karen E., Brancaccio, James, Huang, Wu-Song, Kwong, Ranee W., Katnani, Ahmad D. |
المصدر: | Proceedings of SPIE; Nov1997, Issue 1, p319-328, 10p |
قاعدة البيانات: | Complementary Index |
تدمد: | 0277786X |
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DOI: | 10.1117/12.275794 |