مؤتمر
Ion induced electron emission from Si and photoresist surfaces.
| العنوان: | Ion induced electron emission from Si and photoresist surfaces. |
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| المؤلفون: | Zhao, Z. Y., Xu, J. J., Guo, B. N., Arrale, A. M., Renfrow, S. N., Mehta, S., McDaniel, F. D. |
| المصدر: | AIP Conference Proceedings; Jun1999, Vol. 475 Issue 1, p810-813, 4p |
| قاعدة البيانات: | Complementary Index |
Find this article in full text from Scitation. | تدمد: | 0094243X |
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| DOI: | 10.1063/1.59291 |