دورية أكاديمية
Polysilicon metal-insulator-semiconductor electron emitter.
العنوان: | Polysilicon metal-insulator-semiconductor electron emitter. |
---|---|
المؤلفون: | Govyadinov, Alexander, Novet, Thomas, Pidwerbecki, David, Ramamoorthi, Sriram, Smith, Jim, Chen, John, Otis, Chuck, Neiman, David, Benning, Paul |
المصدر: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 2, p853-863, 11p |
قاعدة البيانات: | Complementary Index |
تدمد: | 10711023 |
---|---|
DOI: | 10.1116/1.1864060 |