دورية أكاديمية
Lithographic evaluation and processing of chlorinated polymethylstyrene.
| العنوان: | Lithographic evaluation and processing of chlorinated polymethylstyrene. |
|---|---|
| المؤلفون: | Hartney, M. A., Tarascon, R. G., Novembre, A. E. |
| المصدر: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1985, Vol. 3 Issue 1, p360-366, 7p |
| قاعدة البيانات: | Complementary Index |
Find this article in full text from Scitation. | تدمد: | 0734211X |
|---|---|
| DOI: | 10.1116/1.583264 |