دورية أكاديمية
Detection of low-contrast fiducial marks for electron beam direct write.
| العنوان: | Detection of low-contrast fiducial marks for electron beam direct write. |
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| المؤلفون: | Garofalo, J. G., Kostelak, R. L. |
| المصدر: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 6, p1431-1437, 7p |
| قاعدة البيانات: | Complementary Index |
Find this article in full text from Scitation. | تدمد: | 0734211X |
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| DOI: | 10.1116/1.584551 |