دورية أكاديمية
Atomic nitrogen production in a high efficiency microwave plasma source.
| العنوان: | Atomic nitrogen production in a high efficiency microwave plasma source. |
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| المؤلفون: | McCullough, R. W., Geddes, J., Croucher, J. A., Woolsey, J. M., Higgins, D. P., Schlapp, M., Gilbody, H. B. |
| المصدر: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1996, Vol. 14 Issue 1, p152-155, 4p |
| قاعدة البيانات: | Complementary Index |
Find this article in full text from Scitation. | تدمد: | 07342101 |
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| DOI: | 10.1116/1.579912 |