دورية أكاديمية
Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas.
| العنوان: | Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas. |
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| المؤلفون: | Ostrikov, K. N., Xu, S., Shafiul Azam, A. B. M. |
| المصدر: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 1, p251-264, 14p |
| قاعدة البيانات: | Complementary Index |
Find this article in full text from Scitation. | تدمد: | 07342101 |
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| DOI: | 10.1116/1.1430426 |