دورية أكاديمية
Characterization of ultrashallow dopant profiles using spreading resistance profiling.
| العنوان: | Characterization of ultrashallow dopant profiles using spreading resistance profiling. |
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| المؤلفون: | Tan, L. S., Tan, L. C. P., Leong, M. S., Mazur, R. G., Ye, C. W. |
| المصدر: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 1, p483-487, 5p |
| قاعدة البيانات: | Complementary Index |
Find this article in full text from Scitation. | تدمد: | 10711023 |
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| DOI: | 10.1116/1.1426370 |