دورية أكاديمية

The effect of Ar+ ion implantation on the electrical characteristics of Cr/P-Si Schottky diodes.

التفاصيل البيبلوغرافية
العنوان: The effect of Ar+ ion implantation on the electrical characteristics of Cr/P-Si Schottky diodes.
المؤلفون: Malherbe, J. B., de Witt, B., Berning, G. L. P.
المصدر: Journal of Applied Physics; 3/15/1992, Vol. 71 Issue 6, p2757, 3p, 1 Chart, 2 Graphs
مصطلحات موضوعية: ION implantation, CHROMIUM, SILICON, SCHOTTKY barrier diodes
مستخلص: Examines the effect of argon[sup+] ion implantation on the electrical characteristics of chromium/p-type silicon Schottky diodes. Significance of high-energy ion implantation of metal-silicon systems; Characteristics for some typical diodes before and after implantation at the indicated dose densities; Schottky parameters at different ion dose densities.
قاعدة البيانات: Complementary Index
الوصف
تدمد:00218979
DOI:10.1063/1.351049