دورية أكاديمية

Effects of annealing and periodic ion bombardment on the soft magnetism of FexN films by a double ion beam sputtering system.

التفاصيل البيبلوغرافية
العنوان: Effects of annealing and periodic ion bombardment on the soft magnetism of FexN films by a double ion beam sputtering system.
المؤلفون: Naoe, M., Nagakubo, M., Yamamoto, T.
المصدر: Journal of Applied Physics; 11/15/1988, Vol. 64 Issue 10, p5449, 3p, 1 Diagram, 5 Graphs
مصطلحات موضوعية: ION bombardment, SPUTTERING (Physics), MAGNETISM
مستخلص: Discusses the effects of annealing and periodic ion borbardment on the soft magnetism of Fe[subx] films by a double ion beam sputtering system. Relaxation of internal stress in films by annealing; Modification of microscopic morphology by ion bombarding; Schematic diagram of double ion beam sputtering apparatus.
قاعدة البيانات: Complementary Index
الوصف
تدمد:00218979
DOI:10.1063/1.342343