التفاصيل البيبلوغرافية
العنوان: |
Effects of annealing and periodic ion bombardment on the soft magnetism of FexN films by a double ion beam sputtering system. |
المؤلفون: |
Naoe, M., Nagakubo, M., Yamamoto, T. |
المصدر: |
Journal of Applied Physics; 11/15/1988, Vol. 64 Issue 10, p5449, 3p, 1 Diagram, 5 Graphs |
مصطلحات موضوعية: |
ION bombardment, SPUTTERING (Physics), MAGNETISM |
مستخلص: |
Discusses the effects of annealing and periodic ion borbardment on the soft magnetism of Fe[subx] films by a double ion beam sputtering system. Relaxation of internal stress in films by annealing; Modification of microscopic morphology by ion bombarding; Schematic diagram of double ion beam sputtering apparatus. |
قاعدة البيانات: |
Complementary Index |