التفاصيل البيبلوغرافية
| العنوان: |
Interfacial reactions of titanium thin films on BF+2 -implanted (001)Si. |
| المؤلفون: |
Lur, W., Chen, L. J. |
| المصدر: |
Journal of Applied Physics; 10/15/1989, Vol. 66 Issue 8, p3604, 8p, 18 Black and White Photographs, 3 Charts, 1 Graph |
| مصطلحات موضوعية: |
SURFACE chemistry, THIN films, TITANIUM, SILICON |
| مستخلص: |
Studies the interfacial reactions of titanium thin films on BF[sub+2]-implanted (001) silicon. Experimental procedures; Results of the study; Conclusions. |
| قاعدة البيانات: |
Complementary Index |
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