التفاصيل البيبلوغرافية
العنوان: |
Interfacial reactions of titanium thin films on BF+2 -implanted (001)Si. |
المؤلفون: |
Lur, W., Chen, L. J. |
المصدر: |
Journal of Applied Physics; 10/15/1989, Vol. 66 Issue 8, p3604, 8p, 18 Black and White Photographs, 3 Charts, 1 Graph |
مصطلحات موضوعية: |
SURFACE chemistry, THIN films, TITANIUM, SILICON |
مستخلص: |
Studies the interfacial reactions of titanium thin films on BF[sub+2]-implanted (001) silicon. Experimental procedures; Results of the study; Conclusions. |
قاعدة البيانات: |
Complementary Index |