التفاصيل البيبلوغرافية
| العنوان: |
Ion transit through capacitively coupled Ar sheaths: Ion current and energy distribution. |
| المؤلفون: |
Greene, W. M., Hartney, M. A., Oldham, W. G., Hess, D.W. |
| المصدر: |
Journal of Applied Physics; 3/1/1988, Vol. 63 Issue 5, p1367, 5p, 1 Chart, 5 Graphs |
| مصطلحات موضوعية: |
ARGON, PLASMA gases, IONIZATION of gases, IONS |
| مستخلص: |
Presents a study which examined ion transit through capacitively coupled argon plasmas. Measurement of ion current and ion energy distribution of argon; Experimental details; Results and discussion. |
| قاعدة البيانات: |
Complementary Index |
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