التفاصيل البيبلوغرافية
العنوان: |
Optimization of x-ray sources for proximity lithography produced by a high average power Nd:glass laser. |
المؤلفون: |
Celliers, P., Da Silva, L. B., Dane, C. B., Mrowka, S., Norton, M., Harder, J., Hackel, L., Matthews, D. L., Fiedorowicz, H., Bartnik, A., Maldonado, J. R., Abate, J. A. |
المصدر: |
Journal of Applied Physics; 6/1/1996, Vol. 79 Issue 11, p8258, 11p, 3 Diagrams, 13 Graphs |
مصطلحات موضوعية: |
LASER beams, DIRECT energy conversion |
مستخلص: |
Presents information on a study that measured the conversion efficiency of laser pulse energy into x rays from variety of solid planar targets and a xenon gas puff target irradiated using a high average power Nd:glass slab laser. Experimental procedure; Results and discussion on the study; Conclusions. |
قاعدة البيانات: |
Complementary Index |