مؤتمر
The electrical characteristics analysis of SiOxNy ARC for sub-0.17· ·Gigabit DRAM.
| العنوان: | The electrical characteristics analysis of SiOxNy ARC for sub-0.17· ·Gigabit DRAM. |
|---|---|
| المؤلفون: | Chi-Hoon Lee, Nak-Jin Son, Sun-Cheol Hong, Seung-Moo Lee, Dong-Gun Park, Won-Hee Jang, Tae-Hyun An, Wonshik Lee |
| المصدر: | 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497); 2001, p38-41, 4p |
| قاعدة البيانات: | Complementary Index |
Full Text Finder | ردمك: | 9780780374324 |
|---|---|
| DOI: | 10.1109/ISDRS.2001.984433 |