Use of Spatial Pattern Recognition (SPR) for Enhancing the Resolution and Identification of Rogue Tools in Manufacturing.

التفاصيل البيبلوغرافية
العنوان: Use of Spatial Pattern Recognition (SPR) for Enhancing the Resolution and Identification of Rogue Tools in Manufacturing.
المؤلفون: Retersdorf, M., Anand, A., Drozda-Freeman, A., Mclntyre, M., Xin Song, Wang, J.
المصدر: 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference; 2008, p200-205, 6p
قاعدة البيانات: Complementary Index
الوصف
ردمك:9781424419647
DOI:10.1109/ASMC.2008.4529030