مؤتمر
CMOS-Integrable Piston-Type Micro-Mirror Array for Adaptive Optics Made of Mono-Crystalline Silicon using 3-D Integration.
| العنوان: | CMOS-Integrable Piston-Type Micro-Mirror Array for Adaptive Optics Made of Mono-Crystalline Silicon using 3-D Integration. |
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| المؤلفون: | Lapisa, M., Zimmer, F., Niklaus, F., Gehner, A., Stemme, G. |
| المصدر: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems; 2009, p1007-1010, 4p |
| قاعدة البيانات: | Complementary Index |
Full Text Finder | ردمك: | 9781424429776 |
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| DOI: | 10.1109/MEMSYS.2009.4805556 |